Phenom™ G6 Pro SEM

Scanning Electron Microscope (SEM, benchtop)

Phenom G6 Pro SEM from nanoScience Instruments™ (Thermo Fisher™) with a cesium hexaboride source. This benchtop instrument is for users who do not need the very high resolution of the state-of-the-art SEM and TEM instruments available at the UCSD Nano-3 facility. Situated between confocal optical microscopy and these high-end electron microscopes in terms of resolution, the instrument provides a user-friendly entry point for persons not familiar with electron microscopy.  Back-scattered detection (BSD), secondary electron detection (SED), or mixed detection are available. Magnification range of 160-350,000x. A single-stub stage supports sample sizes up to 25mm x 35 mm. Sample introduction is very rapid: 18 seconds between initial pump-down and image acquisition. A sample charging reduction stage is available (BSD mode) for samples that cannot be sputter coated.  A Luxor Sputter Coater is also available, for inverted coating (argon atmosphere) of up to 7 sample stubs with platinum layers of thickness 1-100nm to reduce charging in the electron beam. Can be used for sample drying as well. UC users: $15/coating run; Non UC users: $21.75/coating run.  Up to 7 sample stubs can be included in a single coating run.

QuickStart Video

Hourly rate: UC Users: $65 • non-UC Users: $94.25

Location: Pacific Hall room 4019 • UC San Diego Main Campus • 9500 Gilman Drive, La Jolla, CA 92093-0358 USA

Contact: Ricardo De Luna, Facility Manager
email the Facility Manager to reserve this instrument or a training activity


The UC San Diego MRSEC-MCF is a user and service facility associated with the NSF-funded UC San Diego Materials Research Science and Engineering Center, dedicated to materials characterization, assays, and sample processing.

We ask that any publications or presentations acknowledge use of these MRSEC-supported facilities with the following statement:

“The authors acknowledge the use of facilities and instrumentation supported by NSF through the UC San Diego Materials Research Science and Engineering Center (UCSD MRSEC), grant # DMR-2011924”